May 2021
Duplex sputter growth!
First deposition attempts by means of simultaneous bombardment of two material targets with anti-parallel ion beams (left). The material systems MgO and ZrO2 were chosen as a case study. The resulting coating on both sides of the substrate enables the formation of stress-free optical coatings. Evidence of the successful coating of the substrate with MgOx or ZrOx was provided by means of X-ray photoelectron spectroscopy (XPS) (right). A slight cross-contamination may be caused the not finally optimized process geometry.