September 2020
First results with the 2DIBS method!
After the leak-tests of the process and loading chambers, a first ion beam source could be put into operation. With the compact radio frequency generators integrated at the ion beam source, an argon plasma was tested over a wide range of parameters in the 2DIBS facility in order to verify the values previously determined ex-situ. At the same time, the design and performance of the pumping system was confirmed.