Description of the R&D plan
A demonstration system for the 2DIBS technology is to be developed as part of the project. Concrete coating tasks from practice can be solved on the system and the suitability of the technology for the respective applications can be validated. The project is divided into three areas of responsibility:
- Development of a deposition chamber: First of all, a sputter deposition system is to be implemented for combinatorial coating on both sides.
- Structure of in-situ diagnostics:Precise layer thickness analysis is essential for the production of complex material sequences. The spectrally and polarization-resolved reflection measurement is preferred for this.
- Layer optimization and solid state analysis: The function of the deposition system is to be validated on different layer systems for various substrates.
◄ State of the art and targeted innovation
Measures for technology transfer and Disposal plan ►