Inhaltspezifische Aktionen

LaMa Seminar (3 sessions), Prof. Teplyakov - ALD / ALE

Wann

18.02.2026 10:00 bis 23.02.2026 11:00 (Europe/Berlin / UTC100)

Name des Kontakts

Telefon des Kontakts

0641 9933602

Termin zum Kalender hinzufügen

iCal

  • Atomic Layer Deposition & Atomic Layer Etching

    Seminar series for all members of the research groups organized in the ZfM, the Chemistry and the Physics Institutes (students of Materials Science / Advanced Materials, Chemistry and Physics welcome!)

    Speaker: Prof. Dr.  Andrew V. Teplyakov, full professor at University of Delaware, USA

    Topics, Times and Venues:
    1) Chemical modification of semiconductor surfaces as a basis of area-selective deposition
    Wednesday, Feb. 18 – 10:00 to 11:00 am, HBR 19 (Chemistry), room C 107
    2) Control of area selectivity in ALD by small molecule inhibitors and small molecule promoters
    Thursday, Feb. 19 – 10:00 to 11:00 am, HBR 19 (Chemistry), room C 107
    3) Organic modification in atomic layer etching, with applications to tertiary and 2D van der Waals materials
    Monday, Feb. 23 – 10:00 to 11:00 am, HBR 16 (Physics), room 511