Magnetron Sputtering Facilities
Platform:
Thin-Film and Epitaxy Laboratory (DünE)
Location:
Physics Institute and Workshop Building, Heinrich-Buff-Ring 16/20, several rooms (basement)
Type, properties, other information:
Self-construction / modified, RF and pulsed operation, substrate heating, up to 5 materials in the film stack without air contact, glovebox; it is possible to deposit films of Mo, Pt, ZnO:Al, VO2, WO3, LiPON
Person in Charge:
Dr. Martin Becker
Institute of Experimental Physics I
Physics Building, Heinrich-Buff-Ring 16, room 227a
Phone +49-641-99-33103
e-Mail