Geräte-en

Plasma-Focused-Ion-Beam Scanning Electron Microscopy (PFIB-SEM)

Atomic Layer Deposition (ALD)

Electron-Beam Lithography (EBL)

Mercury Porosimetry

Photolithography

Ion-Beam Etcher

Reactive-Ion Etcher

Electron-Gun Vapor Deposition

Thermal Vapor Deposition

3D Microlithography

Field-Emission Scanning Electron-Microscopy

Hybrid Time-of-Flight Mass-Spectrometry (ToF-SIMS)

X-Ray Photoelectron Spectroscopy (XPS)

Battery Cycling Systems

Impedance Analyzers

Contact Angle Gauge

Thin-Film X-Ray Diffraction (XRD) (Janek group)

Powder X-Ray Diffraction (XRD) (Janek group)

Molecular-Beam Epitaxy (MBE)

Nanotracking Analyser