Electron-Beam Lithography (EBL)
Platform:
Micro- and Nanofabrication Laboratory (MiNaLab)
Location:
Physics Building, Heinrich-Buff-Ring 16, room 407
Type, properties, other information:
SEM JEOL JSM 7001-F with XeDraw2 writing unit
Cost Rates:
User Operation - 50 €/h (Lithography mode); 40 €/h (Microscopy mode)
Service Operation - 90 €/h (Lithography mode); 80 €/h (Microscopy mode)
Person in Charge:
Dr. Torsten Henning
Institute of Experimental Physics I
Physics Building, Heinrich-Buff-Ring 16, room 429
Phone +49-641-99-33191