The Micro- and Nanofabrication Laboratory (MiNaLab)

Short Description MiNaLab: The Micro- and Nanofabrication Laboratory (cleanroom) is operated by the research group of Prof. Klar. Further Information (in German) can be found here.

Please find the usage regulations (in German) here.

The following equipment is available:

MiNaLab: 3D Microlithography; Electron-Beam Lithography (EBL); Electron-Gun Vapor Deposition; Field-Emission Scanning Electron-Microscopy (MiNaLab); Ion-Beam Etcher; Photolithography; Reactive-Ion Etcher; Thermal Vapor Deposition

MiNaLab - Reinraum