MiNaLab https://www.uni-giessen.de/en/faculties/research-centers/materials/platt/geraete-en/collection-plattforms/minalab https://www.uni-giessen.de/@@site-logo/logo.png Document Actions MiNaLab 3D Microlithography Electron-Beam Lithography (EBL) Electron-Gun Vapor Deposition Field-Emission Scanning Electron-Microscopy (MiNaLab) Ion-Beam Etcher Photolithography Reactive-Ion Etcher Thermal Vapor Deposition