Document Actions

Photolithography

Platzhalter 400x300 px

Research Group in Charge:

Prof. Dr. Peter J. Klar

 

Platform:

Micro- and Nanofabrication Laboratory (MiNaLab)

 

Location:

Physics Building, Heinrich-Buff-Ring 16, room 407

 

Type, properties, other information:

Maskaligner Suss MA56

 

Person in Charge:

Dr. Torsten Henning

Institute of Experimental Physics I

Physics Building, Heinrich-Buff-Ring 16, room 429

Phone +49-641-99-33191