Confocal Laser Microscope

Research Group in Charge:

Prof. Dr. Derck Schlettwein

Platform:

none

Location:

Physics Lecture-Hall Building, Heinrich-Buff-Ring 14, room 44

Type, properties, other information:

Keyence VK-9710K
optical microscopy with lateral resolution up to 0.001 µm and hight resolution up to 0.001 µm (for determination of layer thicknesses)

Person in Charge:

Prof. Dr. Derck Schlettwein

Institute of Applied Physics

Physics Building, Heinrich-Buff-Ring 16, room 141

Phone +49-641-99-33400

e-Mail