Ion-Beam Sputtering Facility

Research Group in Charge:

Prof. Dr. Peter J. Klar

Platform:

Thin-Film and Epitaxy Laboratory (DünE)

Location:

Physics Building, Heinrich-Buff-Ring 16, room 06 (basement)

Type, properties, other information:

Self-construction, with substrate heating, up to 3 materials in the film stack without air contact, dual beam (combined deposition of materials)

Person in Charge:

PD Dr. Angelika Polity

Institute of Experimental Physics I

Physics Building, Heinrich-Buff-Ring 16, room 229

Phone +49-641-99-33117

e-Mail