Ion-Beam Sputtering Facility
Platform:
Thin-Film and Epitaxy Laboratory (DünE)
Location:
Physics Building, Heinrich-Buff-Ring 16, room 06 (basement)
Type, properties, other information:
Self-construction, with substrate heating, up to 3 materials in the film stack without air contact, dual beam (combined deposition of materials)
Person in Charge:
Dr. Martin Becker
Institute of Experimental Physics I
Physics Building, Heinrich-Buff-Ring 16, room 227a
Phone +49-641-99-33103
e-Mail