Magnetron Sputtering Facilities

Research Group in Charge:

Prof. Dr. Peter J. Klar

Platform:

Thin-Film and Epitaxy Laboratory (DünE)

Location:

Physics Institute and Workshop Building, Heinrich-Buff-Ring 16/20, several rooms (basement)

Type, properties, other information:

Self-construction / modified, RF and pulsed operation, substrate heating, up to 5 materials in the film stack without air contact, glovebox; it is possible to deposit films of Mo, Pt, ZnO:Al, VO₂, WO₃, LiPON

Person in Charge:

PD Dr. Angelika Polity

Institute of Experimental Physics I

Physics Building, Heinrich-Buff-Ring 16, room 229

Phone +49-641-99-33117

e-Mail