Profilometer
Platform:
Location:
Physics Lecture-Hall Building, Heinrich-Buff-Ring 14, room 44
Type, properties, other information:
Alpha-Step 100 from Tencor Instruments
for measurements of layer thickness and roughness
Person in Charge:
Prof. Dr. Derck Schlettwein
Institute of Applied Physics
Physics Building, Heinrich-Buff-Ring 16, room 141
Phone +49-641-99-33400