Magnetron Sputtering Facility
Platform:
Thin-Film and Epitaxy Laboratory (DünE)
Location:
Chemistry Building, Heinrich-Buff-Ring 17, room B 44
Type, properties, other information:
Surface, with glovebox; exclusively for depositing LiPON films
Person in Charge:
Dr. Joachim Sann
Institute of Physical Chemistry
Chemistry building, Heinrich-Buff-Ring 17, Room A 13a
Phone +49-641-99-34506