June 2014The picture shows a scanning electron microscopy image of a dense, lithium ion conducting thin film of amorphous lithium phosphorous oxinitride (“LiPON”). It has been deposited on a porous substrate via RF-magnetron-sputtering of a lithium phosphate (Li3PO4) target in a nitrogen atmosphere (bottom left). The nitrogen incorporates throughout two different coordination numbers that can be identified via x-ray photoelectron spectroscopy (XPS, top right). The films of thicknesses between several hundred nanometers and a few microns achieve overall conductivities in the order of 10−6 S∙cm−1. (Picture submitted by Martin Busche.)https://www.uni-giessen.de/en/faculties/f08/departments/physchem/janek/gallerypotm/pom2014/PoM0614/viewhttps://www.uni-giessen.de/@@site-logo/logo.png
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June 2014
The picture shows a scanning electron microscopy image of a dense, lithium ion conducting thin film of amorphous lithium phosphorous oxinitride (“LiPON”). It has been deposited on a porous substrate via RF-magnetron-sputtering of a lithium phosphate (Li3PO4) target in a nitrogen atmosphere (bottom left). The nitrogen incorporates throughout two different coordination numbers that can be identified via x-ray photoelectron spectroscopy (XPS, top right). The films of thicknesses between several hundred nanometers and a few microns achieve overall conductivities in the order of 10−6 S∙cm−1. (Picture submitted by Martin Busche.)
